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check valves flowlink

Check valve technical overview

In the gas panel of a semiconductor tool or within any gas system, a check valve has a critical safety and process-integrity function. Flowlink design custom or standard ultra-high purity valves.

Discover all our UHP valves

Main fonctionnal advantages of
check valves.

The primary function of a check valve is to allow gas to flow in only one direction and prevent reverse flow. The integration of check valves in gas panels or gas lines is necessary in order to :

Prevent overpressure

Prevent overpressure

  • In the process chamber.
  • In the exhaust vacuum system.
Prevent backflow

Prevent backflow

  • To the process chamber.
  • Of process gases that could flow backward into the other gas lines, sensitive flow components (such as Mass Flow Controllers or pressure regulators), gas sources or canisters.
Other advantages

Other advantages

  • Avoid unexpected gas mixing of incompatible gases that could cause chemical reactions, explosion or equipment damage.
  • Ensures stable flow rates regardless downstream pressure changes.
  • Ensures purge gas flow or vent in the required direction.
  • Maintain internal pressure and integrity of components or tools during transportation.

Key technical specifications of FLOWLINK's
check valve.

Pressure & Temperature ratings

Check valves cover a wide range of operating conditions depending on their construction :

  • Pressure range from vacuum to 30 bar depending on the model.
  • Temperature range from 0°C to 120°C depending on the model.

Cracking pressure

The cracking pressure is the minimum upstream pressure required to open the valve.

Flowlink offers various models of check valves for specific cracking pressure values to choose between. From ultra low valves such as 1 psi to standard values such as 5 psi.

Gas Compatibility

Material of O’Ring is to be chosen between EPDM, Viton, Kalrez or Nitrile for correct process gas compatibility and for correct temperature range. There would be a solution whatever the process gases are inert, corrosive, pyrophoric or oxydizers.

Discover our full range of
check valves.

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flowlink UHP gas components

Find out more about our
other ranges of UHP Valves.

Flowlink specializes in the design of standard or custom UHP valves :

We also provides filters, accessories and fittings.

See our notices and datasheets